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G. Poli
G. Poli
Bell Labs
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Ion implantation
Atomic physics
Annealing (metallurgy)
Dopant
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Rapid thermal annealing of dopants implanted into preamorphized silicon
1985
Journal of Applied Physics
T. E. Seidel
R.V. Knoell
G. Poli
Bertram Schwartz
F.A. Stevie
Paul K. Chu
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Citations (36)
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