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M. Kerber
M. Kerber
Infineon Technologies
Condensed matter physics
Amorphous solid
Dielectric
Capacitor
High-κ dielectric
2
Papers
39
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Reliability of Al2O3-doped ZrO2 high-k dielectrics in three-dimensional stacked metal-insulator-metal capacitors
2010
Journal of Applied Physics
Dayu Zhou
Uwe Schroeder
Jin Xu
Johannes Heitmann
Gunther Jegert
Wenke Weinreich
M. Kerber
Steve Knebel
Elke Erben
Thomas Mikolajick
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Citations (26)
Time dependent dielectric breakdown of amorphous ZrAlxOy high-k dielectric used in dynamic random access memory metal-insulator-metal capacitor
2009
Journal of Applied Physics
Dayu Zhou
Uwe Schroeder
G. Jegert
M. Kerber
S. Uppal
Rimoon Agaiby
M. Reinicke
Johannes Heitmann
Lars Oberbeck
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Citations (13)
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