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L. Zimmermann
L. Zimmermann
Delft University of Technology
Adsorption
Oxygen
Oxide
Physics
Deuterium
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Effect of the silicon top layer of silicon implanted with oxygen on the uptake and release of deuterium by the buried oxide
1998
Applied Physics Letters
L. Zimmermann
J. M. M. de Nijs
Paul F. A. Alkemade
K.T. Westerduin
A. van Veen
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