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Masaru Sasago
Masaru Sasago
Lithography
Photolithography
Government
Excimer laser
Electronic engineering
4
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23
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Lithography solutions for sub-0.1 /spl mu/m generations
1998
VLSIT | Symposium on VLSI Technology
Masaru Sasago
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A 64-Mb DRAM with meshed power line
1991
IEEE Journal of Solid-state Circuits
Toshio Yamada
Yoshiro Nakata
Junko Hasegawa
Noriaki Amano
Akinori Shibayama
Masaru Sasago
Naoto Matsuo
Toshiki Yabu
Susumu Matsumoto
Shozo Okada
Michihiro Inoue
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Citations (17)
1