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Xueliang Zhu

Xi'an Jiaotong University

16

Papers

33

Citations

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Experiment on phase correction of reflection fringe based on camera calibration

2019
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Research on the calibration method of reference flat based on gravity deformation

2018
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Design of an ultraprecision computerized numerical control chemical mechanical polishing machine and its implementation

2018 Optical Engineering
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Improvement and application of pad conditioning accuracy in chemical mechanical polishing

2018 Optical Engineering
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Research of the wavefront detection method based on the scanning pentaprism

2017 ICP | IEEE International Conference on Photonics
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High-precision self-adaptive phase-calibration method for wavelength-tuning interferometry

2017 Measurement Science and Technology
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Aspheric Surface Measurement Using Capacitive Sensors

2017 Sensors
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Study on phase demodulation technique with fast and high accuracy for interference fringe pattern

2015 ICP | IEEE International Conference on Photonics
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Citations (1)