Old Web
English
Sign In
Acemap
>
authorDetail
>
Chien-Wen Lai
Chien-Wen Lai
National Chiao Tung University
Ellipsometry
Surface roughness
Thin film
Analytical chemistry
Plasma etching
1
Papers
4
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Assessment of interface roughness during plasma etching through the use of real-time ellipsometry
2011
Applied Surface Science
Chien-Yuan Han
Chien-Wen Lai
Yu-Faye Chao
Ke-Ciang Leou
Tsang-Lang Lin
Show All
Source
Cite
Save
Citations (4)
1