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Atsushi Shigenobu
Atsushi Shigenobu
Canon Inc.
Optics
Physics
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Computer vision
Artificial intelligence
3
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12
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New projection optics and aberration control system for the 45-nm node
2007
Proceedings of SPIE
Toshiyuki Yoshihara
Bunsuke Takeshita
Atsushi Shigenobu
Yasuo Hasegawa
Yoshinori Ohsaki
Kazuhiko Mishima
Seiya Miura
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