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N. Doganaksoy
N. Doganaksoy
GlobalFoundries
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Shot noise
Lithography
Resist
Optics
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Deconstructing contact hole CD printing variability in EUV lithography
2014
Proceedings of SPIE
Deniz E. Civay
Tom Wallow
N. Doganaksoy
Erik Verduijn
Gerard Schmid
Pawitter Mangat
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Citations (5)
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