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Junne Dar Chern
Junne Dar Chern
Metallurgy
Thin film
Polishing
Contact mechanics
Engineering
1
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Analysis of the Tribological Mechanisms Arising in the Chemical Mechanical Polishing of Copper-Film Wafers
2004
Journal of Tribology-transactions of The Asme
Jen-Fin Lin
Junne Dar Chern
Yang Hui Chang
Ping Lin Kuo
Ming-Shih Tsai
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Citations (23)
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