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Ch. Große
Ch. Große
Fraunhofer Society
Pressure sensor
Optoelectronics
Fabrication
Doping
Silicon
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Local metal segregation as root cause for electrical shorts in highly doped pressure sensor devices
2021
Microelectronics Reliability
Michél Simon-Najasek
Patrick Diehle
Ch. Große
Susanne Hübner
G. Brokmann
B. Sprenger
Frank Altmann
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