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Thomas S. Rupp
Thomas S. Rupp
IBM
Electronic engineering
Dram
Trench
Nitride
Integrated circuit layout
3
Papers
11
Citations
0
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Nitride framed shallow trench isolation (NFSTI) for self-aligned buried strap in high performance trench capacitor DRAM/eDRAM
2001
VLSI-TSA | International Symposium on VLSI Technology, Systems, and Applications
Byeong Y. Kim
Y. Fukuzaki
G.K. Worth
J. Nuetzel
G Williams
B. Lee
Y. Takegawa
Scott Halle
Thomas S. Rupp
Akira Sudo
Ramachandra Divakaruni
Radhika Srinivasan
T. Mii
Gary B. Bronner
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Extending trench DRAM technology to 0.15 /spl mu/m groundrule and beyond
1999
IEDM | International Electron Devices Meeting
Thomas S. Rupp
N.Chaudhary
K. Dev
Y. Fukuzaki
Jeffrey P. Gambino
Herbert L. Ho
J. Iba
E. Ito
Edward W. Kiewra
Byeong Y. Kim
M. Maldei
T. Matsunaga
J. Ning
Rajesh Rengarajan
Akira Sudo
Dirk Tobben
Mary E. Weybright
G.K. Worth
R. Divakaruni
Radhika Srinivasan
Johann Alsmeier
Gary B. Bronner
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Citations (9)
1