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R. Sowerby
R. Sowerby
Bishop's University
Chemical vapor deposition
Dimethylsilane
Thin film
Analytical chemistry
Carbon
1
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Chemical and Structural Characterization of SiONC Dielectric Thin Film Deposited by PSCVD
2006
Journal of The Electrochemical Society
El Hassane Oulachgar
C. Aktik
Starr Dostie
R. Sowerby
S. Gujrathi
Mihai Scarlete
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