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Takahisa Hasegawa
Takahisa Hasegawa
JEOL Ltd.
Nanolithography
Multiple patterning
Electron-beam lithography
Nanoimprint lithography
Photolithography
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Evaluation of a next generation EB mask writer for hp 32nm lithography
2010
Tadashi Komagata
Takahisa Hasegawa
Kazuya Goto
Kenji Kono
Ryuuji Yamamoto
Naoki Nishida
Yasutoshi Nakagawa
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Citations (4)
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