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Byungmin Yoo
Byungmin Yoo
Extreme ultraviolet lithography
Ptychography
Materials science
Microscope
Optics
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Actinic mask imaging using EUV ptychography microscope
2021
Young-Woong Kim
Byungmin Yoo
Dong-Gi Lee
Chang Mo Ku
Joong Hwee Jcho
Jinho Ahn
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