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R. Beernaert
R. Beernaert
IMEC
Wafer dicing
Leak
Wafer
Die preparation
Microelectromechanical systems
1
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Temporary protective packaging for optical MEMS
2011
Lieve Bogaerts
Alain Phommahaxay
C. Gerets
Patrick Jaenen
R Van Hoof
Simone Severi
M. Van De Peer
J. De Coster
R. Beernaert
Sukumar Rudra
A. La Manna
Philippe Soussan
Ann Witvrouw
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