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Seung-Woon Choi
Seung-Woon Choi
Samsung
Engineering
Resist
Simulation
Optics
Message Passing Interface
5
Papers
1
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0
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Simulation of resist heating effect with E-beam lithography using Distributed Processing (DP)
2006
Won-Tai Ki
Byung-Sup Ahn
Ji-Soong Park
Seung-Woon Choi
Sang-Back Ma
Woo Sung Han
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Photomask dry-etching techniques for hard mask
2006
Sung Won Kwon
Young-Ju Park
Sung-yoon Kim
Han-Shin Lee
Hyuk-Joo Kwon
Seung-Woon Choi
Woo Sung Han
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The characterization of line-width in mask using spectrophotometry
2006
Kyoung-Yoon Bang
Yo-Han Choi
Han-June Yoon
Hae Young Jeong
Yong-Hoon Kim
Seung-Woon Choi
Hee-Sun Yoon
Woo Sung Han
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Monitoring system of CD error analysis for the 90-nm node mask manufacturing
2005
Sang-yong Yu
Soon-ho Kim
Byung-Cheol Cha
Yong-Hoon Kim
Seung-Woon Choi
Hee-Sun Yoon
Woo Sung Han
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Simulation of resist heating effect with e-beam lithography using distributed processing (DP)
2005
Won-Tai Ki
Byung-Sup Ahn
Ji-Soong Park
Seung-Woon Choi
Sangback Ma
Woo Sung Han
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Citations (1)
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