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Mark A. Perrin
Mark A. Perrin
Applied Materials
Chemistry
Ion plating
Chemical vapor deposition
Electron beam physical vapor deposition
Physical vapor deposition
3
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Variable quadrupelelektromagnetanordnung, die insbesondere bei einem mehrstufigen verfahren zur bildung einer metallbarriere in einem sputterreaktor verwendet wird
2005
Tza-Jing Gung
Xinyu Fu
Arvind Sundarrajan
Edward P. Hammond
Praburam Gopalraja
John C. Forster
Mark A. Perrin
Andrew S. Gillard
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Reseau de quatre electro-aimants variables utilises, en particulier, dans un procede multi-etape pour former une barriere metallique dans un reacteur de pulverisation
2005
Tza-Jing Gung
Xinyu Fu
Arvind Sundarrajan
Edward P. Hammond
Praburam Gopalraja
John C. Forster
Mark A. Perrin
Andrew S. Gillard
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Modeling and Simulation of Physical Vapor Deposition/Etching Plasmas
2005
Umesh Kelkar
Arvind Sundarrajan
Tza-Jing Gung
Ned Hammond
Ajay Bhatnagar
Xinyu Fu
Mark A. Perrin
John C. Forster
Prabu Gopalraja
Jianming Fu
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