Development of Next-Generation Chemical Mechanical Planarization Process for Panel-level Heterogeneous Integration
0
Citation
4
Reference
10
Related Paper
Abstract:
The integration of large die complex on panel scale requires significant manufacturing technology development with thickness variation control as a key enabler for pitch scaling and redistribution layers (RDLs) with ultra high-density routing. This paper will focus on CMP process development for very large form factor panel-scale (510x515 mm) The magnitude and panel-level uniformity of removal rate are optimized across various materials, slurries, pads, and process parameters. Capabilities for reducing total thickness variation (TTV) are also demonstrated on substrate dielectric layers and on a bridge die interconnect substrate.Keywords:
Chemical Mechanical Planarization
Combined nitrogen production, ammonia synthesis, and power generation for efficient hydrogen storage
An energy-efficient combined system consisting of nitrogen separation, ammonia synthesis and power generation is proposed and evaluated in this work. The integration of combined processes is carried out using the principles of enhanced process integration (EPI) technology. EPI unites two core technologies: exergy recovery and process integration. The former circulates the energy/heat and intensifies its heat exchange in any single process. In addition, the latter facilitates heat integration and utilization among involved processes. Therefore, the exergy loss throughout the combined processes can be reduced significantly, leading to high total energy efficiency. The proposed combined-processes convert the produced hydrogen, especially from coal and other renewable energy, to ammonia. Therefore, the hydrogen can be stored and transported more efficiently and stable. Haber-Bosch process in adopted as ammonia synthesis. In addition, power generation module is also included to recover the heat produced during ammonia synthesis, as well as supply the electricity consumed for nitrogen production. From process modeling and evaluation, the proposed combined-processes show very high energy efficiency, which is about 66.92%, including NH3 conversion efficiency (66.69%) and power generation efficiency (0.23%).
Ammonia production
Exergy efficiency
Power-to-Gas
Cite
Citations (42)
Ammonia synthesis by hydrogen and nitrogen is an important pathway for ammonia production. However, design of an energy efficient and environmentally friendly route for ammonia synthesis is still a challenge and needs to be overcome. Performance and economic feasibility of ammonia synthesis loop processes significantly depend on not only configuration arrangement but also on operating conditions. Thus, a novel ammonia synthesis route with exergy recovery and heat integration was designed by process simulation in this work. The energy and material balance of the proposed process was investigated and compared with the conventional process. The heat integration performance and its influence on total energy consumption were also evaluated. The investigation results showed that the energy consumption of the proposed process was reduced to 16.72 MW, which equaled 38.18% of the conventional process with the feed natural gas of both processes set at 0.083 kmol/s. Approximately 57.9 MW could be recovered in the proposed ammonia synthesis process by heat exchanger networks.
Ammonia production
Process design
Cite
Citations (18)
Implementing process and equipment innovations often result in combined benefits in process yields, throughput, energy efficiency, and reduced capital costs at the same time. Many of these areas include optimizing process flowsheet and condition as well as use of advanced equipment. The powerful methodology for connecting these innovations, to achieve high energy efficiency and simpler designs with low capital is the process integration. The process integration methodology for process design takes a different approach in that process design aspects in the inner part of the onion diagram are allowed to change, which may enhance the possibility of heat recovery and enable more energy savings in the utility system in the outer part of the onion. The discussions in this chapter focus on effects of process changes on energy usage. The pinch analysis tool that can be used for assessing process changes is called the grand composite curve (GCC).
Pinch analysis
Process design
Capital cost
Design process
Process modeling
Cite
Citations (0)
Pinch analysis
Bagasse
Cogeneration
Cite
Citations (16)
Pinch analysis
Endothermic process
Cogeneration
Cite
Citations (1)
Exergy efficiency
Process design
Pinch analysis
Cite
Citations (4)
Within the global challenge of climate change mitigation, CO2 capture and storage is regarded as a potential option to reduce the CO2 emissions in power plants. The most common technology to capture CO2 is chemical absorption with amines, requiring however a significant amount of energy for solvent regeneration and CO2 compression and therefore penalizing the performance of the electricity production. The energy efficiency is reduced by up to 10%-points and the production costs increased by around one third. To reduce the energy and cost penalty of CO2 capture, the recently developed chilled ammonia process is studied here as a promising alternative. It is focused especially on process integration aspects to improve the competitiveness of power plants with CO2 capture. By applying process integration techniques based on the pinch analysis concept, the process energy requirement is identified and the maximal heat recovery and the optimal utility integration are computed. The optimal process integration is computed by solving the heat cascade model of the process. A detailed analysis of the energy integration results, in the form of composite curves expressed in Carnot axis, allows to identify the major exergy losses and to propose process modifications to reduce the losses and improve the performance. It appears that a refrigeration cycle using a water-ammonia mixture as a refrigerant can satisfy the cooling need with almost no exergy losses. It is highlighted that by improving the absorber and refrigeration integration, the competiveness of an NGCC plant with 90% CO2 capture by chilled ammonia can be enhanced. The energy efficiency can be increased from 47% to 52%, which leads to a production cost decrease of 15%.
Pinch analysis
Carnot cycle
Ammonia production
Chilled water
Exergy efficiency
Absorption refrigerator
Cite
Citations (0)
The biobutanol stream obtained after the fermentation step in the acetone–butanol–ethanol process has a low concentration (less than 3 wt % butanol) that leads to high energy usage for conventional downstream separation. To overcome the high downstream processing costs, this study proposes a novel intensified separation process based on a heat pump (vapor recompression)-assisted azeotropic dividing-wall column (A-DWC). Pinch analysis and rigorous process simulations have been used for the process synthesis, design, and optimization of this novel sustainable process. Remarkably, the energy requirement for butanol separation using heat integration and vapor recompression assisted A-DWC is reduced by 58% from 6.3 to 2.7 MJ/kg butanol.
Downstream processing
Pinch analysis
Separation process
Air separation
Cite
Citations (71)
Different technological alternatives for the thermochemical production of liquid fuels from lignocellulosic biomass are systematically analyzed and optimized based on thermo-environomic models. The competitiveness of the production of Fischer-Tropsch fuel (FT), methanol (MeOH) and dimethyl ether (DME) is compared with regard to energetic, economic and environmental considerations, and the optimal process configuration and operating conditions are identified. For the conceptual process design a consistent methodology using simultaneously process integration techniques, life cycle assessment (LCA) and a multi-objective optimization strategy is applied. In particular, the influence of the process integration on the overall process efficiency is investigated by studying several possibilities to satisfy the minimum energy requirements, to recover and valorize at most the available heat, and by studying the effect of the operating conditions. The most promising options for the polygeneration of fuel, power and heat will be identified based on multiple criteria. The performance for the different process steps and some exemplary technology scenarios of integrated plants are computed, and overall energy efficiencies in the range of 50-60% are assessed.
Lignocellulosic Biomass
Dimethyl ether
Cite
Citations (2)
State-of-the-art marine microalgae utilization processes were proposed and their performance with respect to energy consumption was evaluated. Enhanced process integration technology was developed and applied in continuous integrated energy utilization processes of microalgae. The enhanced process integration was developed based on two main principles, first, conventional process integration and, second, a thorough exergy recovery through exergy elevation and effective heat coupling for each type of energy/heat. In this study, the proposed utilization processes include the integration of drying, gasification and combined cycle. The analysis focuses mainly on the application of propose enhanced process integration in microalgae drying. Furthermore, the energy efficiency was analyzed in term of the relation between total required energy and target moisture content of drying. From the results, it is very clear that the proposed processes can reduce the required energy significantly and drying to moisture content of 10 wt% wb seems to be the most energy-efficient. The proposed enhanced process integration could minimize the exergy loss occurred in the whole process.
Exergy efficiency
Cite
Citations (1)