A tuning fork gyroscope with drive-sense orthogonal thin-walled holes for high sensitivity
0
Citation
25
Reference
10
Related Paper
Abstract:
A tuning fork gyroscope (TFG) with orthogonal thin-walled round holes in the driving and sensing directions is proposed to improve sensitivity. The thin walls formed by through holes produce stress concentration, transforming the small displacement of tuning fork vibration into a large concentrated strain. When piezoelectric excitation or detection is carried out here, the driving vibration displacement and detection output voltage can be increased, thereby improving sensitivity. Besides, quadrature coupling can be suppressed because the orthogonal holes make the optimal excitation and detection positions in different planes. The finite element method is used to verify the benefits of the holes, and the parameters are optimized for better performance. The experimental results show that the sensitivity of the prototype gyroscope with a driving frequency of 890.68 Hz is 100.32 mV/(°/s) under open-loop driving and detection, and the rotation rate can be resolved at least 0.016 (°/s)/Hz, which is about 6.7 times better than that of the conventional TFG. In addition, the quadrature error is reduced by 2.7 times. The gyroscope has a simple structure, high reliability, and effectively improves sensitivity, which is helpful to guide the optimization of piezoelectric gyroscopes and derived MEMS gyroscopes.Keywords:
Tuning fork
An Attitude Estimation System based on the Micro Electro Mechanical System(MEMS) inertial sensors was proposed.The principle,the composition and the data collection of the System were discussed.A simple method was designed to fusion accelerometer and gyroscope data in order to obtain accurate information about the inclination of the device relative to the ground plane.This method was based on weighted average of the data from accelerometer and gyroscope,could effectively enhance the precision of the Attitude Estimation System.
Sensor Fusion
Cite
Citations (5)
In this paper we describe the tuning fork gyroscope with orthogonal vibration arms used as a yaw rate sensor. The vibrational displacements of the gyroscope are analyzed using the finite element method, and a new structure for a gyroscope which can be supported at a vibrationless point is presented. It is expected that this gyroscope will be applicable as a yaw rate sensor with a high quality factor and high stability.
Tuning fork
Rate integrating gyroscope
Fork (system call)
Cite
Citations (7)
This paper presents the design and simulation of a single-chip integrated MEMS accelerometer gyroscope by integrating a Coriolis vibratory ring gyroscope and a differential resonant accelerometer into one single-chip structure, measuring both the acceleration and the angular velocity (or the angle). At the same time, it has the advantages of small volume, low cost, and high precision based on the characteristics of a ring gyroscope and resonant accelerometer. The proposed structure consists of a microring gyroscope and a MEMS resonant accelerometer. Tthe accelerometer is located inside the gyroscope and the two structures are concentric. The operating mechanisms of the ring gyroscope and the resonant accelerometer are first introduced. Then, the whole structure of the proposed single-chip integrated accelerometer gyroscope is presented, and the structural components are introduced in detail. Modal analysis shows the resonant frequencies of upper and lower DETFs in resonant accelerometer are 28,944.8 Hz and 28,948.0 Hz, and the resonant frequencies of the ring gyroscope (n=2) are 15,768.5 Hz and 15,770.3 Hz, respectively. The scale factor of the resonant accelerometer is calculated as 83.5 Hz/g by the analysis of the input–output characteristic. Finally, the thermal analysis fully demonstrates that the single-chip integrated accelerometer gyroscope has excellent immunity to temperature change.
Rate integrating gyroscope
Cite
Citations (3)
A four-degree-of-freedom gyroscope dynamical model is presented to improve the performance of a tuning fork vibratory MEMS gyroscope. The effects of the driving and sensing micromachined spring beams for the performance of the gyroscope are investigated. Two new types of micromachined spring beams named the "two-sect" driving and "three-sect" sensing spring beams are designed and their stiffness equations are deduced. The evaluation function of the dynamic performance of the gyroscope with improved suspension system can be obtained. A numerical example with finite element analysis for comparison is employed to validate the dynamical analysis. The result shows that the optimized gyroscope has good robustness and high sensitivity. The work is not only suitable for the tuning fork vibratory MEMS gyroscope, but also has an important reference value for other MEMS design of products.
Tuning fork
Suspension
Robustness
Cite
Citations (1)
A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.
Tuning fork
Bar (unit)
SIGNAL (programming language)
Cite
Citations (1)
We report performance results on a MEMS out-of-plane gyroscope suitable for platform stabilization. Angle random walk (ARW) less than 0.006 deg/rt-hr and median bias stabilities over temperature of 0.2 deg/hr have been achieved. Sensor bandwidth as characterized by drive and sense mode frequency separation is Hz allowing system level bandwidth greater than 300 Hz. The HG6900 IMU will integrate these sensors and serve platform stabilization applications in a 259 cm3 volume.
Tuning fork
Cite
Citations (39)
The operation principle of an integrated micromechanical vibratory rate gyroscope was described based on resonant sensing of the Coriolis force. The structure of gyroscope and doubled end tuning fork (DETF) were introduced, the equations on gyroscope and DETF were discussed in detail, and the ranges of designing parameters are presented. It is showed that the new silicon micromechanical resonant output gyroscope will be widely used in the future.
Tuning fork
Rate integrating gyroscope
Cite
Citations (1)
This paper investigates the resilience to mechanical vibration of tuning fork MEMS gyroscopes and presents the limitations of this device. We focus our study on mechanical vibrations near the first three resonance frequencies corresponding to the in-phase and anti-phase drive modes and the sense mode. This original work quantifies the rejection capability of the anti-phase mode to external vibrations in comparison to the in-phase mode resulting in a ratio of 390. In-phase frequency mechanical vibrations can result in mechanical non-linearities visible in the gyroscope response. This paper demonstrates also the strong impact of the in-phase mode on the gyroscope operation leading to failure when it is excited simultaneously with the anti-phase mode. This issue is common to tuning fork gyroscopes and only phase mode control or shift to higher frequencies can preserve normal gyroscope operation at the bandwidth 0 – 50 kHz.
Tuning fork
Resilience
Mode (computer interface)
Rate integrating gyroscope
Cite
Citations (9)
A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.
Tuning fork
Bar (unit)
SIGNAL (programming language)
Cite
Citations (1)
A vibratory tuning-fork MEMS gyroscope is presented in the study. Design concepts for the gyroscope are obtained by introducing the working principle, the suspension system, and the damping. The dynamical simulation is applied to indicate that this gyroscope has achieved high stability and sensitivity by the indirect connection structure and slide-film damping in the drive and sense directions. It is found that the novel structural design for the gyroscope can be seemed as a good approach to increase the performance of tuning-fork gyroscope.
Tuning fork
Rate integrating gyroscope
Fork (system call)
Suspension
Cite
Citations (6)