Structural, morphological and photoluminescent properties of annealed ZnO thin layers obtained by the rapid sol-gel spin-coating method
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In 2O 3 thin film is prepared by sol gel technology. We analyzed the relation between the prepared conditions and the resistance of the thin film. The thin film was researched by XPS,XRD, so we got the structure and composition of the thin film, and direct heat gas sensor was fabricated with this thin film. It has good sensitivity to C 2H 2OH.
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Cupric oxide were prepared by sol-gel technique and deposited onto glass substrates as thin films using spin coating method. The aim of this research was to study the effects of different spin coating speeds and solution concentrations of cupric oxide thin films on the structural, optical, electrical and physical properties of thin films. Thin films were deposited with concentration variation of the solution ranging from 0.5 M-1 M and speed variation from 1200 rpm-2400 rpm. X-ray diffraction (XRD) and UV-Vis spectrophotometer were used to characterize the structural and optical properties of the deposited films, respectively. The as-synthesized CuO thin films were also characterized using SEM. The dc electrical properties were characterized using nano-electrometer. Based on the results obtained, it was found that the electrical resistivity of the cupric oxide thin films increases as spin coating speeds increase. The optical band gap values of CuO thin films for concentration variation were found 1.47-1.27 eV and for speed variations, it was observed 1.45-1.95 eV. Decreased values of the optical energy gap were observed with increasing concentration while reverse effect was found with increasing speed of spin coating.
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Electrometer
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A review was given on the progress of research on the protection coating prepared by sol-gel method. Thus the preparation and process of sol-gel method were introduced. The principle and characteristics of the heat treatment of the sol-gel coating were discussed, and the application status and development of the technology were summarized. The methods for the preparation of single oxide coating such as ZrO_2, SiO_2, CeO_2, Al_2O_3, and TiO_2, double oxide coating such as ZrO_2-CeO_2, SiO_2-ZrO_2, and multi-component oxide coating were discussed as well. Moreover, the protection mechanisms of the coatings were dealt with. It was pointed out that the sol-gel method used for the preparation of protection coating has obvious advantages in improving the chemical endurance of the substrate and preventing it from oxidation and corrosion.
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Deposition
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Extrusion spin coating was developed to reduce photoresist waste and to improve coating uniformity in microlithography. This new method uses an efficient extrusion coating technique to apply a thin film of resist to a wafer prior to spinning. This initial layer of photoresist eliminates the spreading phase, the most inefficient step in conventional spin coating. The initial layer also provides existing spin coating models with preset initial conditions, allowing the prediction of coating thickness and uniformity a priori. This paper compares the experimental results with Emslie et al.'s predictive models of spin coating. A solvent concentration of 80% or higher in the coating chamber environment was found to be necessary to attain a predictable coating thickness with 5-/spl Aring/ uniformity. With optimized process variables, the mean coating thickness matched theoretical predictions within a variation of 0.01 /spl mu/m. Defect-free coating results were achieved with coating efficiencies as high as 40%.
Photoresist
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Copper oxide were prepared by sol-gel technique and deposited onto quartz substrates as thin films using spin coating method. The aim of this research was to study the effects of different spin coating speeds of copper oxide thin films on the electrical and optical properties of the thin films. Five samples of copper oxide thin films with different spin coating speeds of 1000, 1500, 2000, 2500 and 3000 rpm were annealed at 600°C for 30 minutes. UV-Vis spectrophotometer and two-point probe technique were used to characterize the optical and electrical properties of the deposited films. Based on the results obtained, it revealed that the electrical conductivity of the copper oxide thin films reduce as the spin coating speeds increase. The calculated optical band gap and the resistivity of the copper oxide thin films also decrease when the spin coating speeds are increased.
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Copper oxide
Fused quartz
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