Surface Chemical Structural Analysis of Diamond-like Carbon Films by X-ray Photoelectron Spectroscopy
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Abstract:
ダイヤモンドライクカーボン(DLC）は，sp2炭素・sp3炭素・水素からなるアモルファス炭素同素体である．本報では，著者らがこれまで行ってきたX線光電子分光法（XPS）によるDLC薄膜の表面化学構造解析について解説する．DLC薄膜のC 1sスペクトルは，Gauss関数を重畳したDoniach-Šunjic関数によって解析され，sp2/sp3炭素ならびに炭素‐炭素/炭素‐水素結合の差異を説明する4成分に波形分離された．本解析は，高分解弾性反跳検出（ERD）法による実水素量分布に対応した．他方，DLC表面の酸素官能基分析のための，簡単な数学的処理を加味した修正気相化学誘導体化(GCD）法も解説する．本法は解析を複雑にする副反応を考慮しており，DLC表面の酸化プロセスをよく説明することができた．以上の議論より，XPSはDLC表面の包括的な分析ツールになり得ると結論する．Keywords:
Carbon fibers
Carbon fibers
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Carbon fibers
Thermal Stability
Diamond-like carbon
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Ambient pressure
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Carbon fibers
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X-ray and ultraviolet photoelectron spectroscopies (XPS and UPS) were used to characterize as-deposited ScN(001) layers grown in situ. The films were deposited by ultrahigh vacuum reactive magnetron sputtering on MgO(001) at 800 °C in pure N2 discharges maintained at a pressure of 5 mTorr (0.67 Pa). Mg Kα and monochromatic Al Kα x-ray sources were used to obtain the XPS spectra, while the UPS data were generated by He I and He II UV radiation. The spectra show that the ScN(001) surfaces are free of O and C. The films were found to have a slight excess of nitrogen, in agreement with Rutherford backscattering spectroscopy (RBS) results, yielding a N/Sc ratio of 1.11 ± 0.03.
Monochromatic color
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Photoelectric effect
Surface layer
Chemical state
Electron spectroscopy
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Carbon fibers
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XPS（X-ray Photoelectron Spectroscopy: X 線光電子分光法） は AES（Auger Electron Spectroscopy:オージェ電 子分光法） や TOF-SIMS（Time-of-Flight Secondary Ion Mass Spectrometry:飛行時間型二次イオン質量分析法） とならぶ代表的な表面分析手法の一つである ． XPS を用いることにより物質表面の組成分析， さらには化学 結合状態の分析を行うことができる ． XPS はその取扱いの簡単さ ， データベースの豊富さ ， 実用的には帯電 補正が容易， などといったことから， 表面分析手法の中では最も幅広く用いられている手法である ． ここでは， XPS の基本原理， 装置の構成， スペクトルの測定と解析における基本的な留意点， および応用例について述 べる ．
Auger electron spectroscopy
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Carbon fibers
Tannic acid
Reinforced carbon–carbon
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The feasibility of utilizing X‐ray photoelectron spectroscopy ( XPS ) to analyze room‐temperature ionic liquids ( RTILs ) was investigated in this study. Conventionally, the chemical structure of organic compounds is identified by nuclear magnetic resonance ( NMR ) spectroscopy. The properties of RTILs , especially their low vapor pressure, make it possible to analyze RTILs by using XPS . The usefulness of XPS on RTILs was confirmed by commercial RTILs . All atoms in RTILs were detected in survey XPS spectra, and the calculated atomic percentages matched well with theoretical values. After the verification of commercial RTILs by XPS , we synthesized three RTILs and investigated them with XPS . The atomic ratio and chemical environment of carbon in RTILs were verified by XPS . By adapting XPS to the investigation of RTILs , carbon atoms in different chemical environments were distinguishable by the binding energy shift, and the atomic ratio of the constituent atoms was identifiable after peak deconvolution. In addition, inorganic constituents were detected by XPS unlike in the case of NMR spectroscopy.
Chemical shift
Carbon fibers
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