A model to relate siloxane chemical structure to tribological performance
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Siloxane
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Sunflower, corn, rapeseed, olive, and linseed oils were used for investigation.Their fatty-acid compositions have been evaluated by gas chromatography.The tribological properties were determined with a four-ball machine.Flash and set points, static and dynamic viscosity of the oils were estimated by standard methods.The results of tests show that refined plant oils possess better tribotechnical properties than the base mineral oil without additives.It was found that their antiwear and bearing resistance properties correlate with the structure of fatty acids molecules.It is demonstrated that the activation of unsaturated bonds as a result of the triglycerides oxidation has a positive influence on friction due to tribopolymerization and film formation on the contact surfaces.
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Boundary lubrication
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The main characteristics of the structure of the siloxane bond are examined and the results of studies on the structures and properties of oxygen-containing silicon compounds by physical methods are reviewed. The bibliography includes 405 references.
Organosilicon
Siloxane
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We have successfully applied the Stribeck+ curve to determine the tribological mechanism involved in the ring-slurry-pad interface during CMP at various pressures and velocities. Using two types of slurries (one for copper and another for inter-layer dielectric polishing) and two differently designed rings made of polyether ether ketone (PEEK), one with sharp slots and the other with rounded slots. We find "boundary lubrication" as the initial dominant lubrication mechanism followed by a transition to "mixed lubrication" as pseudo-Sommerfeld numbers increase. Coefficient of friction (COF) values for the ring with sharp slots are larger than their rounded counterparts. COF values are also higher for inter-layer dielectric (ILD) processes as compared to copper. In all cases, COF values are directly correlated with average pad surface temperature. The trend in Stribeck+ curves are explained by plotting a new parameter, referred to as directivity, which shows the cluster shape evolution to be a real phenomenon (and not an optical illusion due to the log-log nature of the curve, nor the inherent dependence of the two axes on one another) caused by force fluctuations at the extreme ranges of velocity and pressure. Raw data from the Stribeck+ curves are used to construct a new "kinetic" plot to help infer the relative wear rate of the ring thus allowing one to choose process parameters that balance it against wafer removal rate. Validation studies involving extended wear of eight differently formulated retaining rings show a correlation between wear rate and the "inferred" wear rate which renders credibility to our approach regarding the above-mentioned "kinetic" plots.
Chemical Mechanical Planarization
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Basis (linear algebra)
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Siloxane
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Abstract An extensive range of base fluids has been considered for the formulation of partially and fully synthetic lubricants. In this paper, polyethers are discussed in relation to their tribological properties and chemical structure. Physical properties are reviewed, including water solubility, viscosity‐pressure and thermal stability. Oxidation stability is discussed, and tribological examination shows significant advantages of polyethers, with various additives, in friction, gear and other tests, compared with mineral oils.
Thermal Stability
Synthetic oil
Chemical Stability
Viscosity index
Mineral oil
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Surfaces of solid bodies contain characteristic features, affecting the functional properties of machine elements [...]
Solid surface
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