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    Development of deposition technique for PZT thin film in MEMS
    Baioenjiniaringu Koenkai koen ronbunshu/Baioenjiniaringu Kouenkai kouen rombunshuu/Ippan Shadan Hojin Nihon Kikai Gakkai Baioenjiniaringu Koenkai (2003)
    Toshiaki KitagawaYuji OkudaKazuyoshi TsuchiyaEiji NAKAMACHI
    Deposition
    Citations (0)
    Mechanical and Ferroelectric Response of Highly Textured PZT Films for Low Power MEMS
    Ioannis Chasiotis
    Abstract : In the reporting 1.5 month period we established the basic experimental tools required to carry out experiments with thin Pt films that serve as top and bottom electrodes in PZT MEMS. The graduate student was trained on materials characterization tools and the microscale thin film testing apparatus at the PI's laboratory. Furthermore, thin Pt films were fabricated at ARL US Army Research Laboratory (ARL) in Adelphi, MD, which are an integral part of the PZT composite films that will be studied in this project.
    Citations (0)
    PZT thin film deposition on a Si 3D substrate
    The Japan Society of Applied Physics (2014)
    Shingo Moriue
    Deposition
    Citations (0)
    Development of PZT Films in MEMS Device
    Cailiao gongcheng (2004)
    Hongmei LiuChengjun QiuMao‐Sheng Cao
    The preparation of PZT films, the problems in fabrication, the PZT films integrated with MEMS device and the development of PZT films application in MEMS are presented in this paper. Their foreground of PZT films application is also prospected.
    Citations (0)
    OPTIMIZING DIRECT PRINTING OF PZT THIN FILMS
    1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest (2008)
    Stephen BathurstJooeun JeonH.W. LeeS.G. KimPeter Mardilovich
    We recently reported a new method for depositing lead zirconate titanate (PZT) thin films via thermal ink jet (TIJ) printing of a modified sol-gel [1].The use of PZT in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing processes.Direct printing of PZT thin films eliminates the need for photolithographic patterning and etching, allows for controlled deposition over non-planar topographies, and enables the fabrication of devices with varying thickness which cannot be accomplished with conventional spin coating processes.This paper reports conditions of deposition and crystallization for PZT thin films via thermal ink jet printing.Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.
    Lead zirconate titanate
    Spin Coating
    Deposition
    Citations (2)
    Sputtered highly oriented PZT thin films for MEMS applications
    S. Kalpat
    Citations (0)
    Fabrication Processes and Characteristics of Microelectromechanical System Using PZT Films
    MRS Proceedings (1996)
    Young Soo YoonJong Hyuk KimTea-Young LimU. BonnéAngelika Schmidt
    Bulk micromachining
    Citations (6)
    Fabrication of high-aspect-ratio PZT structure by sol-gel process using SI mold for MEMS transducers
    Yiqi yibiao xuebao (2013)
    Nan WangShinya YoshidaMasafumi KumanoMasayoshi Esashi
    Aspect ratio (aeronautics)
    Citations (0)
    High Performance Sputtered PZT Film for MEMS applications
    TechConnect Briefs (2012)
    Takami ArakawaJ BirkmeyerTsuguru FujiiYoshikazu HishinumaY Li
    Citations (7)
    Printed PZT Thick Films Implemented for Functionalized Gas Sensors
    Key engineering materials (2018)
    Maria Isabel Rua-TabordaOnuma SantawiteeAngkana PhongphutBralee ChayasombatChanchana Thanachayanont
    Attractive for MEMS, PZT thick films are often microstructured on Si supporting platforms to span the gap between ceramics and thin film technologies. Printing process might lead to lower cost than ceramic process to open routes for MEMS applications. In this paper processing by screen-printing of Au/PZT/Au thick-films supported on alumina or completely released from the substrate are described. Investigations of the film microstructures nevertheless show lower densification than those of bulk ceramics. Prior to selective coating deposition, routes to improve the reduction of the film’s porosity are proposed.
    Screen printing
    Deposition
    Dip-coating
    Citations (2)