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    Fourier Transform Infrared Spectroscopy (FTIR) and Scanning Electron Microscopy (SEM) Analysis of Chemically Treated Bagasse Fibre
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    Bagasse
    Fourier transform spectroscopy
    With many of research on Fourier transform IR (FTIR) on low-k materials, our experiments extended the FTIR spectroscopy application to characterization and analysis of the low-k dielectric thin film properties on patterned wafers. FTIR spectra on low-k materials were successfully captured under three sampling modes: reflection, attenuated total reflectance (ATR), and mapping mode. ATR mode is more suitable for CHx band than reflection mode due to its higher sensitivity in this range. FTIR spectroscopy signal analysis on mixed structures (metal and low-k dielectric material) on patterned wafers was also investigated with mapping mode. Based on our investigation, FTIR can be used for low-k material studies on patterned wafer.
    Attenuated total reflection
    Fourier transform spectroscopy
    Low-k dielectric
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    The effect of heat generated at the rear surface of film samples on spectral features in Fourier transform infrared photoacoustic spectroscopy(FTIR-PAS) was examined experimentally. It was found that careful positioning of samples in a PA cell was required for obtaining reasonable FTIR-PA spectra of films corresponding to absorption spectra.
    Photoacoustic Spectroscopy
    Fourier transform spectroscopy
    With many of research on Fourier transform IR (FTIR) on low- k materials, our experiments extended the FTIR spectroscopy application to characterization and analysis of the low- k dielectric thin film properties on patterned wafers. FTIR spectra on low- k materials were successfully captured under three sampling modes: reflection, attenuated total reflectance (ATR), and mapping mode. ATR mode is more suitable for CH x band than reflection mode due to its higher sensitivity in this range. FTIR spectroscopy signal analysis on mixed structures (metal and low- k dielectric material) on patterned wafers was also investigated with mapping mode. Based on our investigation, FTIR can be used for low- k material studies on patterned wafer.
    Attenuated total reflection
    Fourier transform spectroscopy
    Low-k dielectric
    Reflection
    Citations (2)
    The speed and specificity of Fourier Transform Infrared Spectroscopy (FTIR) affords great advantages in the study of chemical reactions. Reactants, intermediates, and products can be monitored in-situ and in real time, under reaction conditions.
    Fourier transform spectroscopy
    Citations (2)
    The attenuated total refraction infrared spectroscopy(ATR-FTIR)is an important experimental method,it greatly expands the application fields of infrared spectroscopy.Several kinds of polymer materials were analysed by ATR-FTIR.The infrared spectrum characteristic peaks can effecticely determine the type of polymer.Infrared spectroscopy can also be applied in the composition determination of the copolymer or blend.
    Attenuated total reflection
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