Measurement Methods for Piezoelectric Coefficient of Piezoelectric Thin Films
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Film materials and devices have been widely used in micro-electromechanical system(MEMS) system with the development of micromation,high sensitivity and integration of electronic devices.But the measurement methods for piezoelectric properties of piezoelectric thin films are very different from those of bulk materials.Two categories of measuring piezoelectric properties of piezoelectric thin films were introduced in this paper: direct measurement(including pneumatic pressure rig,cantilever method,laser interferometer method and laser Doppler vibrometer method)and indirect measurement(conventional impedance analyzer).The basic principle,measurement characterization,application status and problems were all illustrated in this paper,the advantages/disadvantages of these techniques were compared for piezoelectric applications and the future development of measurement characterization of piezoelectric thin films were predicted.Keywords:
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We report on characterization of microsale lead zirconate titanate (PZT) thin film cantilevers, by both optical and electrical measurements, for up to the 7 th resonance mode in 2kHz to 2MHz frequency range, with quality (Q) factors between 380 and 600. We also calibrate the PZT thin film's inverse piezoelectric coefficient (e31 ≈ -5C/m 2 ). This work presents a multiphysical characterization of important material and device properties of microscale PZT cantilevers for enabling piezoelectric MEMS sensors and resonant piezoelectric transducers, which hold promises for multiphysics sensing, on-chip energy scavenging, and wireless power transmission.
Lead zirconate titanate
Characterization
Multiphysics
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Thin film piezoelectric devices, processed in Si-related processes, are attractive for ultrasound transducers and piezoelectric switches. Thin film ultrasound transducer enable large bandwidth (> 100%), high frequency operation. In piezoelectric micromachined ultrasonic transducers (PMUTs) the ultrasonic waves are generated by flexural motion of the membrane, which is coupled to strain in the piezoelectric film. We have investigated the piezoelectric properties of thin films for ultrasound transducers and piezoelectric switches. Thin film piezoelectric ultrasound transducers as well as piezoelectric switches have been designed, processed and characterized. Thin film piezoelectric devices with excellent quality and reliability have been realized.
Piezoelectric accelerometer
Nanogenerator
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A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV or this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.
Laser scanning vibrometry
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Converse
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Based on 1-3 type piezoelectric fiber composites and measurement methods of piezoelectric fibers,a new measuring method was developed,in order to measure the performance of the piezoelectric fiber.This paper described the measuring principle,and analyzed the key components of the experiment.It obtained the parameters of which meet the measurement requirements.The measurement samples are produced,the experimental results show that this method is feasible.It provides an effective way to measure the piezoelectric constants of piezoelectric fiber of micrometers.
Piezoelectric accelerometer
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Aluminum nitride (AlN) is a piezoelectric material that is commonly used in various MEMS applications. However, determining the properties of the thin film typically requires multiple test structures, and there are various methods for obtaining the piezoelectric properties. This paper highlights the development of a capacitive based test structure that is capable of determining the different material properties. In addition this paper compares various test methods used to determine the piezoelectric properties of AlN.
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Introduction Classification of Dielectric Materials Important Dielectric Parameters Electrostrictive Effect Piezoelectric Effect Pyroelectric Effect Ferroelectric Materials Poling Applications of Ferroelectric Materials Piezoelectric Characteristics Piezoelectric Coefficients Tensor Form of Piezoelectric Equations Independent Components of Piezoelectric, Elastic, and Dielectric Matrices Generator and Motor Actions of Piezoelectric Materials Strain versus Electric Field in Piezoelectric Materials Piezoelectric Coupling Coefficient k Dynamic Behaviour of a Piezoelectric Material Piezoelectric Materials Quartz Lead Zirconate Titanate (PZT) Fabrication of PZT Polymer Piezoelectric Materials Other Piezoelectric Materials Composite Piezoelectric Materials Engineering Applications of Piezoelectric Materials Gas Lighter Pressure Sensor Accelerometer Piezoelectric Gyroscope-Angular Rate Sensors Piezoelectric Microphone Piezoelectric Ultrasonic Transducers for Sound Navigation and Ranging (SONAR) Piezoelectric Tactile Sensor Energy Harvesting Piezoelectric Electronic Buzzer and Tweeter Piezoelectric Actuators Piezoelectric Motor Piezoelectric Micro Pump Piezoelectric Ultrasonic Drill Ultrasonic Cleaner Quartz Crystal Oscillator Quartz Crystal Balance Quartz Tuning Fork in Atomic Force Microscope Piezoelectric Transformer Nondestructive Testing (NDT) of Materials Using Ultrasonics Noise and Vibration Control Structural Health Monitoring Piezoelectric Sensors and Actuators in Smart Systems and Robots Medical Applications of Piezoelectric Materials Blood Pressure Monitor Piezoelectric Heartbeat Monitor Piezoelectric Tactile Sensor-Endoscopic Grasper and Minimal Invasive Surgical Instrument Piezoelectric Accelerometer-Monitoring Patient Activity and Detecting Tremors Piezoelectric Pump-Drug Delivery and Biomedical Analyses Ultrasonic Imaging Bone Density Measurement Using Ultrasound Ablation of Tumour Cells Using High-Intensity Focused Ultrasound (HIFU) Ultrasound for Drug Delivery Ultrasonic-Induced Transdermal Drug Delivery Phaco Emulsification-Cataract Surgery Therapeutic Ultrasound-Treatment of Injury, Muscular Pain, and Bone Fracture Modelling and Virtual Prototyping of Piezoelectric Devices Using Finite Element Software Tools Finite Element Method Theory of Coupled Field Finite Element Analysis for Piezoelectric Structure Introduction to FE Analysis of Piezoelectric Devices Using a Software Tool Examples of FE Analyses of Piezoelectric Devices
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Ultrasonic motor
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Lead zirconate titanate
Electromechanical coupling coefficient
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The charge constant of piezoelectric material is one of the crucial constant values. At the present time, the measurement of this value is mostly realized by means of three techniques: the frequency method, the laser interferometer technique, and the quasi-static method. These techniques have been practically applied to piezoelectric ceramic samples. Our paper presents comparison of the individual methods with regard to their accuracy and the demands placed on the instrumentation and preparation of the piezoelectric material samples. A "soft" ceramic product marketed under the production code of NCE51 was used in the experiments. The methods are described in detail, including the process of sample preparation, description of the experiments, and procedure of calculating coefficients from the measured values.
Instrumentation
Sample (material)
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In this work, novel and simple method is described for the determination of the thin-film piezoelectric coefficient d 33 , which utilizes the conventional impedance or network analyzer. The technique avoids complicated preparation and uses arbitrary sample geometry. It may be used to determine the piezoelectric coefficient for films having a thickness ranges from several nanometers up to around several hundreds micrometers. The predicted values for the piezoelectric coefficient are found to be close to those that have been determined by more elaborated methods.
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