Development of Fabrication and Application of MEMS Micro-needle
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MEMS micro-needle is an actual hot point of research,which has a broad prospect in biomedicine.Some new fabrication methods of micro-needle were described in this paper and their advantages and disadvantages were analyzed.In addition,the latest development of research on micro-needle application was reviewed.The challenge and development trend were also pointed out.Keywords:
Biomedicine
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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensing devices with improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adopted to develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materials' selection to the final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.
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Applications of nanotechnology
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This chapter contains sections titled: Metals Semiconductors Thin Films for MEMS and Their Deposition Techniques Materials for Polymer MEMS Bulk Micromachining for Silicon-based MEMS Silicon Surface Micromachining Microstereolithography for Polymer MEMS Conclusions References
Bulk micromachining
Deposition
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We have been developing the Proton Beam Writing System to fabricate micro chemical chips. The micro fabrication process using the imprint technology was verified as one of the proton beam writing system. Though the Ni molding with micro structures was fabricated using the electroless plating, there were problems such as the thermal expansion of the resist and the adhesive force of the Ni plating. By solving these problems, the Ni molding with micro structures succeeded in using the electroless plating. In addition, the thermoplastic polymer, PET succeeded in imprint using the Ni molding molding. The proton beam writing system has the potential to be able to fabricate the micro chemical chips incorporating novel sensors and filters.
Molding (decorative)
Plating (geology)
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