Silicon Nanotweezers for Molecules and Cells Manipulation and Characterization
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In this chapter, Silicon Nanotweezer (SNT) is presented as a generic microdevice allowing bio-mechanical assays of filamentary molecules and cells. SNT operations and design are presented. The chapter explains the SNT microfabrication process; the operations and applications to molecules and cell characterization. Commonly integrated in microsystem designs, folded-beam springs are designed to minimize beams areas, decrease their mechanical stiffness, and enhance displacement ranges. In the current design, three sets of folded-beam suspensions support different parts of the system and provide the electrical connections for the actuation and sensing. In phenomenological models, the dynamic properties inform us on the stiffness and dissipation at the resonance frequency, whereas the static properties are related directly to the force. The monitoring of the resonance properties prevents any damage to the cell or to the SNT. To conclude, the silicon nanotweezers can be applied to handle various objects other than DNA molecules.Keywords:
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1 Overview of MEMS and Microsystems 2 Working Principles of Microsystems 3 Engineering Science for Microsystem Design and Fabrication 4 Engineering Mechanics for Microsystems Design 5 Thermofluid Engineering and Microsystem Design 6 Scaling Laws in Miniaturization 7 Materials for MEMS and Microsystems 8 Microsystem Fabrication Processes 9 Overview of Micromanufacturing 10 Microsystems Design 11 Microsystem Packaging Appendixes 1 Recommended Units for Thermophysical Quantities 2 Conversion of Units between SI and Imperial Systems
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