Laboratory-size three-dimensional water-window x-ray microscope with Wolter type I mirror optics
Shinji OhsukaAkira OhbaShinobu OnodaKatsuhiro NakamotoTomoyasu NakanoMotosuke MiyoshiK. SodaTakao Hamakubo
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Abstract:
We constructed a laboratory-size three-dimensional water-window x-ray microscope that combines wide-field transmission x-ray microscopy with tomographic reconstruction techniques. It consists of an electron-impact x-ray source emitting oxygen Kα x-rays, Wolter type I grazing incidence mirror optics, and a back-illuminated CCD for x-ray imaging. A spatial resolution limit better than 1.0 line pairs per micrometer was obtained for two-dimensional transmission images, and 1-μm-scale three-dimensional fine structures were resolved.Keywords:
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During the past several years, we have analyzed many aspects of spherical and aspherical two-mirror soft x-ray microscopes. These results are summarized and used to project the performance capabilities of a multilayer two-mirror microscope operating within the water window. As a result of the technological developments associated with NASA soft x-ray solar physics projects that have used one- and two-mirror telescopes operating at various wavelengths from 4.4 nm to 33.5 nm, a project has been initiated to fabricate and test a two-mirror microscope initially operating at 13 nm and then, after some developmental work, within the water window where an ultimate spatial resolution of <10 nm seems possible.
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We have designed, analyzed, fabricated, and tested Schwarzschild multilayer X-ray microscopes. These instruments use flow-polished Zerodur mirror substrates which have been coated with multilayers optimized for maximum reflectivity at normal incidence at 135 A. They are being developed as prototypes for the Water Window Imaging X-Ray Microscope. Ultrasmooth mirror sets of hemlite grade sapphire have been fabricated and they are now being coated with multilayers to reflect soft X-rays at 38 A, within the biologically important 'water window'. In this paper, we discuss the fabrication of the microscope optics and structural components as well as the mounting of the optics and assembly of the microscopes. We also describe the optical alignment, interferometric and visible light testing of the microscopes, present interferometrically measured performance data, and provide the first results of optical imaging tests.
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The development and demonstration of a table-top transmission soft X-ray (SXR) microscope, using a laboratory incoherent capillary discharge source has been carried out. This Z-pinching capillary discharge water-window SXR source, is a first of its kind to be used for high spatial resolution microscopy at λ = 2.88 nm (430 eV) . A grazing incidence ellipsoidal condenser mirror is used for focusing of the SXR radiation at the sample plane. The Fresnel zone plate objective lens is used for imaging of the sample onto a back-illuminated (BI) CCD camera. The achieved half-pitch spatial resolution of the microscope approaches 100 nm, as demonstrated by the knife-edge test. Details about the source, and the construction of the microscope are presented and discussed. Additionally, the SXR images of various samples, proving applicability of such microscope for observation of objects in the nanoscale, are shown.
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In this paper the conceptual design and development of a compact vertical type soft x-ray microscope is described. This x-ray microscope operates in the water window wavelength region(2.3∼4.4㎚), where natural contrast between carbon(protein) and oxygen(water) allows imaging of unstained biological material their natural, hydrated environment. Until now, operational x-ray microscopes are based on synchrotron radiation sources, which limit their accessibility. Many biologists would benefit from having the x-ray microscope as a tool among other tools in their own laboratory. For this purpose we introduced the compact vertical type soft X-ray microscope with 50 ㎚ resolution for biomedical application. The compact vertical type soft x-ray microscope is based on a laser plasma x-ray source, doubled ellipsoidal condenser reflective optics, diffractive zone plate optics and MCP coupled with CCD to record an x-ray image.
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Imaging x-ray microscopes currently under development at the Marshall Space Flight Center utilize multilayer x-ray/EUV optical systems and structural components similar to those developed for normal incidence imaging solar x-ray telescopes. The Water Window Imaging X-Ray Microscope is specifically designed to operate at x-ray wavelengths within the `water window' regime, wherein water is relatively transmissive and carbon is highly absorptive. This important natural property of the interaction of x-rays with matter should permit this microscope to sharply delineate carbon based structures within living cells. The ability to image living cells in aqueous physiological environments, with high spatial resolution and high contrast, may afford advantages not available with conventional microscopes and make possible non-invasive strategies for examining living tumor cells without the need of stains or exogeneous chemicals that can produce limiting artifacts. The Water Window Imaging X-Ray Microscope represents a `spinoff' of multilayer x-ray telescope technology. This paper reviews the multilayer x-ray telescope developments which led to this x-ray microscope research. It considers the design, fabrication, optical assembly, alignment, and testing of the prototype microscopes and provides the results of recent studies of ultrahigh resolution photographic films and the design of high reflectivity multilayer coatings for applications in the water window.
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Extreme Ultraviolet Lithography
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We describe the development of the water window imaging x-ray microscope based on normal-incidence multilayer x-ray mirrors. The narrow bandpass response inherent in multilayer x-ray optics is accurately tuned to wavelengths within the "water window." Similar doubly-reflecting multilayer optical systems have been fabricated for our astronomical rocket-borne x-ray/EUV telescopes. Previous theoretical studies performed during the MSFC X-Ray Microscope Development Program established that high-resolution multilayer x-ray imaging microscopes are possible by using either spherical (Schwarzschild configuration) optics or aspherical configu rations. These microscopes require ultrasmooth mirror substrates, which have been fabricated using advanced flow polishing methods. Hemlite-grade sapphire microscope optic substrates have been accurately figured and polished to a smoothness of 0.5-Å rms, as measured by the Zygo profilometer. We describe the current status of fabrication and testing of the optical and mechanical subsystems for the water window imaging x-ray microscope. This new instrument should yield images of carbon-based microstructures within living cells of unprecedented spatial resolution and contrast, without need for fixatives, dyes, and chemical additives.
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Hoover et. al. built and tested two imaging Schwarzschild multilayer microscopes. These instruments were constructed as prototypes for the Water Window Imaging X-Ray Microscope, which is a doubly reflecting, multilayer x-ray microscope configured to operate within the window. The window is the narrow region of the x-ray spectrum between the K absorption edges of oxygen (lamda = 23.3 Angstroms) and of carbon (lamda = 43.62 Angstroms), where water is relatively highly transmissive and carbon is highly absorptive. This property of these materials, thus permits the use of high resolution multilayer x-ray microscopes for producing high contrast images of carbon-based structures within the aqueous physiological environments of living cells. We report the design, fabrication and testing of multilayer optics that operate in this regime.
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Angstrom
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We describe the design of a user-friendly compact water-window x-ray microscope. The microscope is based on a λ=3.37 nm liquid-jet-target laser-plasma source in combination with a normal-incidence multilayer condenser mirror and high-resolution diffractive optics for the imaging. With its high mechanical and thermal stability, the instrument demonstrates enhanced resolution and potential for compact x-ray imaging with the quality of synchrotron-based microscopes. Furthermore, a new sample handling system, computer control, and other improvements facilitate application-oriented x-ray microscopy outside the synchrotron laboratory.
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