Non-contacting Deformation of Resist Micro Pattern due to van der Waals Interaction
0
Citation
11
Reference
10
Related Paper
Abstract:
Deformation and stress distribution of ultra thin resist pattern are estimated by finite element method (FEM) from the measurement values of van der Waals (vdW) force and mechanical properties of resist material. In this simulation, strain and stress distribution in the simple model of the resist pattern are obtained. These results show that the thin resist pattern has high sensitivity to weak vdW force. And, the stress concentrates at an interface between the resist pattern and the substrate. The stress concentration point in the resist pattern would be destructed due to the weak force. In the experiment, the vdW attractive force is measured with an atomic force microscope (AFM) system. The maximum value of the attractive force is about 180nN. The error of the force measurement is prevented to be lower because the no torsion of the cantilever can be observed when the tip is approaching to the thin film resist surface. It is possible to discuss the realization of a soft micro chamber wall made of a soft material such as the cell.Keywords:
Surface stress
Hamaker constant
Hamaker constant
DLVO theory
Particle (ecology)
Cite
Citations (1)
This chapter contains sections titled: Historical development of van der Waals forces and the Lennard-Jones potential Dispersion forces Retarded forces Van de Waals forces between macroscopic bodies Theory of the Hamaker constant Use of Hamaker constants The DLVO theory of colloid stability Flocculation Some notes on van der Waals forces Industrial Report: Surface chemistry in water treatment Sample problems
Hamaker constant
DLVO theory
London dispersion force
Cite
Citations (5)
A mathematical model for analyzing the van der Waals interaction between the internal aqueous droplets (W1) and the external aqueous phase (W2) of double emulsions has been established. The effects of Hamaker constants of the materials forming the system, especially those of the two different adsorbed surfactant layers with uniform density (A1 and A2), on the van der Waals interaction were investigated. The overall van der Waals interaction across the oil film is a combined result of four individual parts, that is, W1−W2, A1−A2, W1−A1, and A2−W2 van der Waals interaction, and it may be either attractive or repulsive depending on many factors. It was found that the overall van der Waals interaction is dominated by the W1−W2 interaction at large separation distances between the W1/O and O/W2 interfaces, while it is mostly determined by the A1−A2 interaction when the two interfaces are extremely close. Specifically, in the cases when the value of the Hamaker constant of the oil phase is intermediate between those of W1 and W2 and there is a thick oil film separating the two interfaces, a weak repulsive overall van der Waals interaction will prevail. If the Hamaker constant of the oil phase is intermediate between those of A1 and A2 and the two interfaces are very close, the overall van der Waals interaction will be dominated by the strong repulsive A1−A2 interaction. The repulsive van der Waals interaction at such cases helps stabilize the double emulsions.
Hamaker constant
DLVO theory
Aqueous two-phase system
Non-covalent interactions
Cite
Citations (7)
In this paper, a dynamics equation of the micro cantilever is presented which includes Van der Waals force. Using the equation, the effects of the Van der Waals force on the natural frequency for the micro cantilever is investigated. Results show that Van der Waals force should be considered for small initial clearance between the micro cantilever and base plate, small cantilever thickness and large cantilever length. To illustrate the analysis, a micro Si cantilever is fabricated and a test of the natural frequencies is done which illustrates the calculative results in this paper.
Hamaker constant
Natural frequency
DLVO theory
Cite
Citations (3)
Hamaker constant
Constant (computer programming)
Cite
Citations (861)
Hamaker constant
Agglomerate
Particle (ecology)
Cite
Citations (126)
Hamaker constant
DLVO theory
Cite
Citations (103)
Casimir–van der Waals forces are important in the self-assembly processes of nanoparticles. In this paper, using a hybrid approach based on Lifshitz theory of Casimir–van der Waals interactions and corrections due to the shape of the nanoparticles, it is shown that for non-spherical nanoparticles, the usual Hamaker approach overestimates the magnitude of the interaction. In particular, the study considers nanoplates of different thicknesses, nanocubes assembled with their faces parallel to each other, and tilted nanocubes, where the main interaction is between edges.
Hamaker constant
Casimir pressure
Cite
Citations (8)
The transition of van der Waals to Casimir forces between macroscopic gold surfaces is investigated by atomic force microscopy in the plane-sphere geometry. It was found that the transition appears to take place at separations ∼10% the plasma wavelength λp for evaporated gold surfaces, which compares to theoretical predictions by incorporation of experimental optical data and roughness corrections. Moreover, the force data allow estimation of the Hamaker constant AH in the van der Waals regime, which is in good agreement with the Lifshitz theory predictions (even if roughness corrections are taken into account) and former surface force apparatus measurements.
Hamaker constant
London dispersion force
Cite
Citations (48)
Hamaker constant
DLVO theory
Particle (ecology)
London dispersion force
Interaction energy
Cite
Citations (35)