Pulsed laser deposition of (110) oriented semiconductive SrFeO 3−x thin films
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Pulsed Laser Deposition
Partial pressure
Deposition
Ambient pressure
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X-ray photoelectron spectroscopy (XPS) is a surface-sensitive technique that gives information on the elemental composition of materials as well as on the chemical state of the elements. Here, the basic principles of XPS are presented. Information on the determination of functional groups is given, and the assistance of chemical derivatization is presented. Some problems related to XPS analysis are mentioned as well. The application of XPS is shown on various examples of polymers with functionalized surfaces or with deposited coatings.
Chemical state
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Oxygen partial pressure during cooling after deposition dependence of crystalline orientation of ArF pulse laser deposited YBa2Cu3O7−x was studied. The crystalline orientation of films deposited in a low oxygen partial pressure was found to change dependent on oxygen partial pressure during cooling after deposition by regrowth in solid phase. In order to investigate the regrowth behavior, magnetization measurements were carried out with respect to films of different thickness fabricated by an Ar ion beamthinning technique.
Partial pressure
Pulsed Laser Deposition
Deposition
Oxygen pressure
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Bulk aluminium material is chosen as targets to prepare pure Al film by the method of pulsed laser deposition(PLD).The thickness uniformity of Al film in coaxial and side-axial deposition modes is also studied comparatively.Besides,the effects of substrate temperature,laser power and repetition rate on deposition rate of Al film in side-axial deposition mode are investigated respectively.The results show that the thickness uniformity of the film gotten in side-axial deposition mode is better than that in coaxial deposition mode.The deposition rate of Al film decreases with the increase of the substrate temperature.However,the deposition rate of Al film increases with increasing laser power.Especially,there is a maximum deposition rate of Al film by varying the laser repetition rate.The above method and results can be used as a theoretical guidance for big area film deposition by PLD in application.
Pulsed Laser Deposition
Deposition
Coaxial
Ion plating
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Photoelectric effect
Surface layer
Chemical state
Electron spectroscopy
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Cu2Ta4O12 (CTaO) thin films were successfully deposited on Si(100) substrates by pulsed-laser deposition technique. The crystalline structure and the surface morphology of the CTaO thin films were strongly affected by substrate temperature, oxygen pressure and target - substrate distance. In general during deposition of CTaO the formation of a Ta2O5 phase appeared, on which CTaO grew with different orientations. We report on the experimental set-up, details for film deposition and the film properties determined by SEM, EDX and XRD.
Pulsed Laser Deposition
Deposition
Morphology
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XPS（X-ray Photoelectron Spectroscopy: X 線光電子分光法） は AES（Auger Electron Spectroscopy:オージェ電 子分光法） や TOF-SIMS（Time-of-Flight Secondary Ion Mass Spectrometry:飛行時間型二次イオン質量分析法） とならぶ代表的な表面分析手法の一つである ． XPS を用いることにより物質表面の組成分析， さらには化学 結合状態の分析を行うことができる ． XPS はその取扱いの簡単さ ， データベースの豊富さ ， 実用的には帯電 補正が容易， などといったことから， 表面分析手法の中では最も幅広く用いられている手法である ． ここでは， XPS の基本原理， 装置の構成， スペクトルの測定と解析における基本的な留意点， および応用例について述 べる ．
Auger electron spectroscopy
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The feasibility of utilizing X‐ray photoelectron spectroscopy ( XPS ) to analyze room‐temperature ionic liquids ( RTILs ) was investigated in this study. Conventionally, the chemical structure of organic compounds is identified by nuclear magnetic resonance ( NMR ) spectroscopy. The properties of RTILs , especially their low vapor pressure, make it possible to analyze RTILs by using XPS . The usefulness of XPS on RTILs was confirmed by commercial RTILs . All atoms in RTILs were detected in survey XPS spectra, and the calculated atomic percentages matched well with theoretical values. After the verification of commercial RTILs by XPS , we synthesized three RTILs and investigated them with XPS . The atomic ratio and chemical environment of carbon in RTILs were verified by XPS . By adapting XPS to the investigation of RTILs , carbon atoms in different chemical environments were distinguishable by the binding energy shift, and the atomic ratio of the constituent atoms was identifiable after peak deconvolution. In addition, inorganic constituents were detected by XPS unlike in the case of NMR spectroscopy.
Chemical shift
Carbon fibers
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Pulsed laser deposition (PLD) is widely used to prepare various kinds of thin films. From many experimental results the film surface has been found to be strongly affected by so-called droplets, which are relatively large target material particles in solid or liquid state carried with the plume. In order to satisfy both purposes of high deposition rate and good quality by the PLD, we have investigated the plume reflection process from the viewpoint to avoid the big particles deposited on the substrate. In the present paper we investigate the influences of the system parameters on surface thin film quality and the deposition rate. Some optimization proposals are also included for this deposition technique.
Deposition
Pulsed Laser Deposition
Reflection
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