Convergent-beam electron diffraction and X-ray diffraction characterization of strained-layer superlattices
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Principle and characteristic of reflection high-energy electron diffraction (RHEED) are described paying to the relations between RHEED patterns and surface morphologies. Some examples indicating the relations are shown. Micro-probe RHEED is also described, in which focused electron beams are used for obtaining crystalline information from surface micro-areas. An in situ observation result of Si thin film growth is shown as an example.
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Reflection
Gas electron diffraction
Low-energy electron diffraction
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A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions. This is an advantage when other measurements are simultaneously undertaken with RHEED. RHEED measurements of a Si(110) surface were performed by placing the Si(110) surface at different positions, and the ability was verified.
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Kikuchi line
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Reflection high-energy electron diffraction (RHEED) intensity oscillations during molecular beam epitaxy (MBE) of II-VI compound of ZnSe are observed for the first time. The MBE growth was achieved on (001)GaAs substrate. After an 1-µm thick ZnSe buffer was grown, stable oscillations were observed at around the molecular beam flux ratio of Zn to Se of 1:3. One period of the oscillation corresponds to the growth rate of monomolecular layer. The observation of the oscillatory behaviors of RHEED is discussed in terms of surface morphology as is observed by RHEED.
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In recent years low energy electron diffraction (LEED—electron energy range 10–500 eV), and to a lesser extent reflection high energy electron diffraction (RHEED—energy range 40–100 keV), have played an important role in the investigation of surfaces of solids. Both techniques are however beset with many experimental and theoretical difficulties. Diffraction techniques in the medium energy range (MEED—energy range 1–10 keV) should have theoretical and experimental advantages over both LEED and RHEED. These advantages are discussed and a review is made of the available theoretical methods suitable for this energy range.
Low-energy electron diffraction
Selected area diffraction
Gas electron diffraction
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The MnAs(1̄100) surface is investigated during growth by reflection high-energy electron diffraction (RHEED). (1×2), (1×1), (2×1) and (4×1) RHEED patterns have been observed by varying the growth conditions, indicating various stoichiometry dependent reconstructions. A phase diagram showing the dependence of the reconstructions on the growth parameters is presented. RHEED intensity oscillations have been found, evidencing layer-by-layer growth of MnAs.
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Stoichiometry
Surface reconstruction
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Abstract After a short retrospect on the development of the electron diffraction techniques it is shown that the atomic‐scale morphology of the crystal surface and growth processes on it can be studied in detail during molecular beam epitaxy (MBE) by reflection high‐energy electron diffraction (RHEED). This is demonstrated for the evolution of the terrace‐step‐structure of the singular GaAs (001) surface during growth and after growth interruption and for the attachment of Si atoms at misorientation steps on vicinal GaAs (001) surfaces.
Vicinal
Misorientation
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Gas electron diffraction
Kikuchi line
Atomic units
Crystal (programming language)
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A new approach to surface structure studies has been tried by using a new type apparatus of reflection high energy electron diffraction (RHEED) . On the basis of experimental results obtained in studies of Si (111) surfaces, it is concluded that the RHEED method including the new techniques is, in principle, superior to LEED for the surface structure research almost in all respects.
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Surface structure
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Oscillation (cell signaling)
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Superstructure
Intensity
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Oscillations in the intensity of reflection high-energy electron diffraction (RHEED) patterns are observed for Fe, Ni, Au, and Mn overlayers epitaxially grown in various combinations on Fe, Ni, Au, Ag, and Ru substrates. Fe whickers are nearly ideal substrates for the study of RHEED and RHEED oscillations during growth. Oscillations for metals and semiconductors show similar dependence on temperature, diffraction angles, and surface impurities.
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Gas electron diffraction
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