On the reflectivity of reactively sputtered Ni/Ti multilayers
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X-ray reflectivity
Neutron reflectometry
Technologically important metal silicides formed through interdiffusion in metal/Si systems has been probed using two complementary techniques viz. x‐ray reflectivity (XRR) and polarized neutron reflectivity (PNR). Both structural and magnetic characterization with good depth resolution has been achieved in these systems. We have studied two systems Si/Co/Si and Si/Ni/Si which relate to important applications in ferromagnetic/ non‐magnetic semiconductor layered structures for memory devices.
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The structures of films and interfaces at the molecular level can be determined from specular reflectivity measurements using neutrons and X-rays. A general introduction to the principles of neutron and X-ray reflectometry is given. Illustrative examples of the application of neutron and X-ray reflectometry to problems of chemical and physical interest are presented.
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Abstract The investigation of organic multilayer structures prepared by means of the Langmuir-Blodgett (LB) technique is found to be complex due to molecular intermixing arising during the preparation procedure. To fully understand the intermixing processes, not only the X-ray reflectivity, but also neutron reflectivity measurement, must be carried out. It has been already reported 1,2] that it is impossible to investigate the chain-chain intermixing process only by X-ray reflectivity. This due to the lack of electron density contrast within the mixed materials. Sufficient contrast, however, can be achieved by applying neutron reflectivity [3,4], because of the possibility to generate a strong contrast between chains by the deuteration process which only slightly changes the material properties. On the other hand, X-ray reflectivity provides sharp layer structure peaks and Kiessig oscillations from which the period of structure and total thickness of film system can be determined.
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X-ray reflectivity
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Al-Ni-based binary alloys offer several intermetallic phases of immense technological importance. We have attempted to understand the growth of interface alloy in an Al-Ni multilayer sample as a function of annealing time using primarily x-ray reflectometry (XRR) and polarized neutron reflectometry (PNR). Powder x-ray diffraction was also used to determine various crystallographic phases in the sample. The multilayer showed remarkable stability with respect to annealing time, following an initial alloy formation at the interface. Stability of such multilayers is important for their applicability as corrosion resistant coatings as well as metallization layers in microelectronic devices. Using XRR and PNR data we have identified the interface layer as ${\text{Al}}_{3}\text{Ni}$ intermetallic phase. Magnetic depth profile obtained from PNR shows that the interface alloy layer is magnetically dead. From the Bragg peak intensities of polarized neutron reflectivity measurements, we have estimated the diffusion lengths after annealing at $160\text{ }\ifmmode^\circ\else\textdegree\fi{}\text{C}$ for 1--8 h.
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In the 1980s, Helmuth Möhwald studied lipid monolayers at the air/water interface to understand the thermodynamically characterized phases at the molecular level. In collaboration with Jens Als-Nielsen, X-ray reflectometry was used and further developed to determine the electron density profile perpendicular to the water surface. Using a slab model, parameters such as thickness and density of the individual molecular regions, as well as the roughness of the individual interfaces, were determined. Later, X-ray and neutron reflectometry helped to understand the coverage and conformation of anchored and adsorbed polymers. Nowadays, they resolve molecular properties in emerging topics such as liquid metals and ionic liquids. Much is still to be learned about buried interfaces (e.g., liquid/liquid interfaces). In this Article, a historical and theoretical background of X-ray reflectivity is given, recent developments of X-ray and neutron reflectometry for polymers at interfaces and thin layers are highlighted, and emerging research topics involving these techniques are emphasized.
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Specular neutron reflectometry was measured on a floating bilayer system consisting of 1,2-dipalmitoyl-d62-sn-glycero-3-phosphocholine deposited over a 1,2-dibehenoyl-sn-glycero-3-phosphocholine bilayer at 25 and 55 °C. The internal structure of lipid bilayers was described by a one-dimensional neutron scattering length density profile model, originally developed for the evaluation of small-angle scattering data. The reflectivity data from the supported bilayer were evaluated separately and used further as constraints in modeling the floating bilayer reflectivity curves. The model reflectivity curves successfully describe the experimental reflectivities of the supported bilayer in the gel phase and the floating bilayer system in the liquid-crystalline phase. The results yield an internal structure of a deposited bilayer and a floating bilayer on the level of component groups of lipid molecules. The obtained structure of the floating d62-diC16:0PC bilayer displays high resemblance of the bilayer structure in the form of unilamellar vesicles. At the same time, however, the results show differences in comparison to unilamellar vesicle bilayers, most likely due to the undulations of supported bilayers.
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X-ray and neutron reflectivity are two non destructive techniques which provide a wealth of information on thickness, structure and interracial properties in nanometer length scale. Combination of X-ray and neutron reflectivity is well suited for obtaining physical parameters of nanostructured thin films and superlattices. Neutrons provide a different contrast between the elements than X-rays and are also sensitive to the magnetization depth profile in thin films and superlattices. The real space information is extracted by fitting a model for the structure of the thin film sample in reflectometry experiments. We have applied a Genetic Algorithms technique to extract depth dependent structure and magnetic in thin film and multilayer systems by simultaneously fitting X-ray and neutron reflectivity data.
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An ion beam deposited multilayer film of nominal thickness [Ni(200 Å)/Al(100 Å)]×5 on Si substrate has been characterized by X-Ray Diffraction(XRD), X-Ray Reflectivity (XRR) and Polarized neutron reflectivity(PNR). The present paper attempts to identify presence of any intermetallic compounds at the interfaces of the as-deposited sample. Structural parameters obtained from XRR and PNR are close to design values.
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Neutron reflectometry
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The use of X-ray and neutron reflectivity measurements to determine the density profile across and interface or across thin films has become increasingly popular over the last few years. However, in general convenient model-independent methods of inverting the reflectivity profiles to obtain the density profile have been missing. We present here one such approach using the method of anomalous reflectivity from the substrate and demonstrate its applicability in the case of an organic thin film.
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