COMPARISON OF SATELLITE AND AERIAL IMAGERY FOR DETECTING LEAF CHLOROPHYLL CONTENT IN CORN
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Inseason sitespecific nitrogen application has the potential to improve the efficiency of nitrogen use and reduceenvironmental contamination. Identification of withinfield crop nitrogen stress is essential for improved nitrogenmanagement. Corn nitrogen stress is frequently associated with leaf chlorophyll content, which can be characterized byspectral reflectance measurements. Therefore, satellite remote sensing has potential for characterizing corn nitrogendeficiency on a wholefield scale. To evaluate the use of satellite imagery to detect nitrogen deficiency in corn during thegrowing season, this study compared spectral variables extracted from SPOT satellite imagery and digital aerial imagery,and investigated the relationship between spectral variables of the SPOT imagery and the measurement data of a handheldchlorophyll meter (or SPAD meter). SPOT images and aerial images were acquired on one commercial field in 1999 andanother one in 2000.The correlation coefficient (r) between the NDVIs derived from the SPOT image and the aerial image was 0.73 in 1999,and 0.54 in 2000, respectively. When the field had large spatial variability in crop development in 1999, the spectral variablesfrom the SPOT image were strongly correlated with those from the aerial image. However, when the crop development wasmore uniform in 2000, the correlation between the SPOT image and the aerial image was not as good. The limited range ofavailable digital counts that can be used to represent the reflectance from an individual farm field for the SPOT system limitedits sensitivity in detecting crop stress. Nevertheless, the NDVIs from SPOT images were significantly correlated with SPADdata in both fields, with correlation coefficients of 0.90 in 1999 and 0.68 in 2000. The correlation between SPOT images andSPAD data was similar to that between aerial images and SPAD data, indicating that SPOT imagery may have potential fordetecting chlorophyll levels and nitrogen stress in corn during the growing season.
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Aerial image
The aerial images of modern photomasks are highly susceptible to CD errors, owing to the high MEEF values characteristic of the low-k1 regime. The requirement for tight wafer CD control thus places stringent constraints on mask errors. Nevertheless, multiple physical variations of the mask parameters can lead to the same aerial CD error. We introduce IntenCDTM, a novel, fast and precise CD variation mapping application running on Applied Materials' aerial image inspection tools. The IntenCD application generates a high-precision map of the CD variation, and allows tighter control of mask manufacturing process and qualification, without loss of precision compared to slow, discrete measurement tools such as CD SEM, but with a higher throughput, while offering complete mask coverage and higher measurement definition. We study and provide the theoretical basis to the IntenCD application. We analyze image formation of dense, repetitive mask patterns under aerial imaging conditions and show, analytically and numerically (through a series of simulations), that for a small perturbation of the nominal physical mask parameters, the relative variation of the average aerial intensity scales linearly with the relative aerial CD error. This linear relation, unique to aerial imaging mask inspection, is independent of the physical source of the variation and of the mask design pitch. Our results imply that a robust aerial intensity measurement can detect sub-nm aerial CD variations. We discuss some practical problems that have to be addressed to obtain this challenging resolution, and describe in some detail the technological solutions.
Aerial image
Critical dimension
Optical proximity correction
Photomask
Process Variation
Variation (astronomy)
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Abstract Beginning with the seminal Dill papers of 1975, the aerial image has been essential for understanding the process of microlithography. From the aerial image, we can predict the performance of a given lithographic process in terms of depth of focus, exposure latitude, etc. As lithographic technologies improved, reaching smaller and smaller printed features, the sophistication of aerial image calculations has had to increase from simple incoherent imaging theory, to partial coherence, polarization effects, thin film effects at the resist, thick mask effects, and so on. This tutorial provides an overview and semihistorical development of the aerial image calculation and then provides a review of some of the various ways in which the aerial image is typically used to estimate the performance of the lithographic process.
Aerial image
Sophistication
Image manipulation
Extreme Ultraviolet Lithography
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Cameras on remote sensing satellites must be calibrated in a timely manner to ensure the quality of the images. This calibration process is done before launch and during on-orbit operation. There are several types of on-orbit calibration, some of them require a calibration area that has to be based on several characteristics. This research was conducted to analyze the feasibility of calibration sites in three areas in Indonesia. Those areas are Jaddih Hill, Kupang Cement Mine, and Bromo Tengger Semeru National Park. An objective method to determine the calibration areas was by observing the image's area from the multispectral camera of the LAPAN-A3 satellite (LISA), the multispectral camera of the LANDSAT-8 satellite (OLI), and Google Earth. Furthermore, it was conducted measuring reflectance and analyzing the uniformity of the area by Coefficient of Variation (CV) calculation. The results show that the Jaddih Hill and Kupang Cement Mine according to the requirements as a calibration area at a range of wavelength from 400–900 nm. Meanwhile, Bromo Tengger Semeru National Park is not recommended on those wavelenght.
Radiometric Calibration
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This paper summarizes the characteristics of China's civil satellite payloads and the research status of radiometric calibration,and ascertains the calibration method flow that suits China's civil satellite payloads.We perform the calibration and validation of civil satellite by using above mentioned methods.The retrieval algorithm of land surface property parameters,such as reflectance and temperature,are researched based on the civil satellite remote sensing data.At last,a application demonstration of land surface products is performed.The result shows that the method stipulated in the paper is appropriate to in-orbit calibration and validation of satellite payloads,and the calibration coefficients are accurate for quantitative application,the demonstration result based on our country remote sensing data is very well.
Radiometric Calibration
Orbit (dynamics)
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Aerial images for line/space patterns, arrays of posts and an arbitrary layout pattern are calculated for EUV masks in a 4X EUV imaging system. Both mask parameters and illumination parameters are varied to investigate their effects on the aerial image. To facilitate this study, a parallel version of TEMPEST with a Fourier transform boundary condition was developed and run on a network of 24 microprocessors. Line width variations are observed when absorber thickness or sidewall angle changes. As the line/space pattern scales to smaller dimensions, the aspect ratios of the absorber features increase, introducing geometric shadowing and reducing aerial image intensity and contrast. 100nm square posts have circular images of diameter close to 100nm, but decreasing in diameter significantly when the corner round radius at the mask becomes greater than 50 nm. Exterior mask posts image slightly smaller and with higher ellipticity than interior mask posts. The aerial image of the arbitrary test pattern gives insight into the effects of the off-axis incidence employed in EUV lithography systems.
Aerial image
Extreme Ultraviolet Lithography
Line (geometry)
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Results from combining satellite, or airborne, FTS measurements with ground-based FTS, chemistry model, and in-situ observations, obtained during several satellite validation campaigns, are presented to demonstrate the synergistic use multi-platform remote sensing and in-situ observations.
Ground station
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This study evaluates the air temperature products of Sentinel-3 and Terra MODIS satellite images, with the aim of determining the comparison results of Sentinel-3 and Terra MODIS satellite images for air temperature observations, and also to determine the minimum and maximum temperatures of the Denpasar area obtained using satellite images. Correlation relationship analysis and Root Mean Square Error (RMSE) were used to investigate the correlation and the degree of accuracy between the air temperature of satellite imagery and the air temperature of field observations. The results showed that Terra MODIS satellite imagery has better accuracy to BMKG air temperature compared to Sentinel-3 satellite imagery. Terra MODIS imagery has a correlation coefficient value of 0.95 and an RMSE value of 0.51, while Sentinel-3 satellite imagery has a correlation coefficient value of 0.78 and an RMSE value of 0.93, so it can be noted that Terra MODIS satellite images are better used in air temperature observations than Sentinel-3 satellite images. The results also showed that the minimum temperature detected by Sentinel-3 satellite images from 32 observations was 9.51°C on September 23, 2021 and the maximum temperature was 41.50°C on April 14, 2021. Meanwhile, in Terra MODIS satellite images from 32 observations, the minimum temperature was 20.57°C on September 23, 2021 and the maximum temperature was 37.08 on April 16, 2021.
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Aerial image
Photoresist
Stepper
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Radiometry
Radiometric Calibration
Instrumentation
Radiometric dating
Thermal infrared
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Abstract. This paper reviews the development of in-orbit radiometric calibration methods in the past 40 years. It summarizes the development of in-orbit radiometric calibration technology of typical satellite sensors in the visible/near-infrared bands and the thermal infrared band. Focuses on the visible/near-infrared bands radiometric calibration method including: Lamp calibration and solar radiationbased calibration. Summarizes the calibration technology of Landsat series satellite sensors including MSS, TM, ETM+, OLI, TIRS; SPOT series satellite sensors including HRV, HRS. In addition to the above sensors, there are also summarizing ALI which was equipped on EO-1, IRMSS which was equipped on CBERS series satellite. Comparing the in-orbit radiometric calibration technology of different periods but the same type satellite sensors analyzes the similarities and differences of calibration technology. Meanwhile summarizes the in-orbit radiometric calibration technology in the same periods but different country satellite sensors advantages and disadvantages of calibration technology.
Radiometric Calibration
Orbit (dynamics)
Radiometry
Radiometric dating
Orbital mechanics
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