Agile-Style Development of CMOS-Integrated Micro Electro Chemical Mechanical Systems by LSI Foundry and Nanotechnology Platform

We report our attempts of agile-style development of CMOS-Integrated Micro Electro Chemical Mechanical Systems, also known as μ-TAS. Agile development is a well known alternative concept of software development. In contrast to classical development (often referred to waterfall model), both users and developers form a team and closely collaborate, and produce many “ready-to-use (but not necessarily be perfect)” versions of “release package”s. Powered by LSI foundry and open facility are enabling factor, we are trying to apply this concept to MEMS devices research and development. Such a quick and efficient development may provide us with future applications of lab-on-chips, which is the theme of the ISESD 2018 conference. The concept and some outcomes are presented in this invited talk.