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Generation of uniform, large area VHF capacitive plasma using phase-modulation and two-frequency technique
Generation of uniform, large area VHF capacitive plasma using phase-modulation and two-frequency technique
2003
Hideo Yamakoshi
Koji Satake
Hiroshi Mashima
Yoshiaki Takeuchi
Masayoshi Murata
Tatsufumi Aoi
Taro Uchiyama
Keywords:
Plasma
Capacitive sensing
Phase shift module
Volumetric flow rate
Electronic engineering
Oscillation
Phase modulation
Geography
Correction
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