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Modification of silicon surface under the action of compression plasma flow
Modification of silicon surface under the action of compression plasma flow
2002
V. Anishchik
V.V. Uglov
V. Astashynski
S. Ananin
V. Askerko
E. Kostyukevich
A. Kuzmitski
N.T. Kvasov
A. Daniluk
Keywords:
Plasma
Compression (physics)
Silicon
Materials science
Composite material
plasma flow
Correction
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