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Effect of illumination on the implantation of P+ ions in Si
Effect of illumination on the implantation of P+ ions in Si
1992
V. V. Artamonov
M. Y. Valakh
A. V. Denisov
V. N. Mordkovich
B. D. Nechiporuk
A. Tybulewicz
Keywords:
Ion implantation
Grain growth
Radiochemistry
Raman spectroscopy
Impurity
Ion
Wafer
Phosphorus
Silicon
Chemistry
Mineralogy
visible radiation
Optics
Analytical chemistry
Correction
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