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Defect analysis of patterned SOI material
Defect analysis of patterned SOI material
1999
Saurabh Bagchi
Yun-Seop Yu
M. Mendicino
J. Richard Conner
Alison Anderson
L. Prabhu
M. Tiner
Michael G. Alles
Keywords:
Electronic engineering
Silicon on insulator
Engineering
Thermal conductivity
Correction
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