Change in stoichiometry by laser-induced plasma deposition of high-Tc superconducting thin films

Abstract Thin high- T c superconducting Bi-Sr-Ca-Cu-O films on single-crystal silicon substrates with SiO 2 and SrTiO 3 buffer layers were prepared by laser-induced plasma deposition. In this process the change of cation concentrations of sintered target material in the thin film was investigated using a Nd-YAG laser with a high repetition rate. We observed in the thin deposits a significant deficit of the earth alkali elements. The change of bismuth concentration with increasing substrate temperature is discussed. The best high- T c superconducting thin Bi-Sr-Ca-Cu-O films were prepared using nonconducting sintered mixture targets in known cation stoichiometry.