Direct bonding for silicon photonics

E. Augendre,J. M. Fedeli,Damien Bordel,Badhise Ben Bakir,Christophe Kopp,Laurent Grenouillet,J.-M. Hartmann,Julie Harduin,P. Philippe,N. Olivier,Maryse Fournier,M. Zussy,K. Lefebvre,J. Sturm,L. Di Cioccio,Laurent Fulbert,L. Clavelier

Direct bonding for silicon photonics

2010

E. Augendre
J. M. Fedeli
Damien Bordel
Badhise Ben Bakir
Christophe Kopp
Laurent Grenouillet
J.-M. Hartmann
Julie Harduin
P. Philippe
N. Olivier
Maryse Fournier
M. Zussy
K. Lefebvre
J. Sturm
L. Di Cioccio
Laurent Fulbert
L. Clavelier

In this paper, we discuss the requirements of direct bonding and show how it can provide photonic electronic integrated circuits including surface grating couplers, Ge photodiodes and energy-efficient hybrid Si/III-V lasers.

Keywords:

Photodiode
Silicon photonics
Photonics
Germanium
Silicon on insulator
Optoelectronics
Integrated circuit
Direct bonding
Silicon
Materials science

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