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Research of Silicon-on-Sapphire Initial Layer Vapor-Phase Formation Techniques
Research of Silicon-on-Sapphire Initial Layer Vapor-Phase Formation Techniques
2018
Sergey D. Fedotov
«Epiel» Jsc, Moscow, Russia
E M Sokolov
Vladimir N. Statsenko
A. V. Romashkin
S. P. Timoshenkov
Keywords:
Silicon on sapphire
Analytical chemistry
Materials science
Optoelectronics
vapor phase
Correction
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