Open-Air Plasma-Deposited Multilayer Thin Film Moisture Barriers.
2020
Emerging moisture sensitive devices require robust encapsulation strategies to inhibit water ingress and prevent premature failure. A scalable, open-air plasma process has been developed to deposit...
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
30
References
10
Citations
NaN
KQI