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A MEMS Accelerometer for Sub-mG Sensing
A MEMS Accelerometer for Sub-mG Sensing
2019
Daisuke Yamane
Toshifumi Konishi
Teruaki Safu
Hiroshi Toshiyoshi
Masato Sone
Katsuyuki Machida
Hiroyuki Ito
Kazuya Masu
Keywords:
Accelerometer
Electronic engineering
Mechanical engineering
Materials science
Microelectromechanical systems
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