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Oxygen at the interface of CVD diamond films on silicon
Oxygen at the interface of CVD diamond films on silicon
1999
A. Bergmaier
M. Schreck
G. Dollinger
O. Schmelmer
K. H. Thürer
B. Stritzker
Keywords:
Chemical vapor deposition
Oxygen
Thin film
Impurity
Epitaxy
Nuclear chemistry
Carbon film
Chemistry
Silicon
Inorganic chemistry
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