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Customized Chemical Compositions Adaptable for Cleaning Virtually all Post-Etch Residues
Customized Chemical Compositions Adaptable for Cleaning Virtually all Post-Etch Residues
2018
M. Cazes
Christian Pizzetti
Jerome Daviot
Philippe Garnier
Lucile Broussous
Laurence Gabette
P. Besson
Keywords:
High-κ dielectric
Composite material
Metallurgy
Materials science
Interconnection
Aluminium
Correction
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