Real time measurement of surface roughness using laser technique

A discussion about recently developed methods for measuring the roughness of the dynamic surface in process has been taken. In order to overcome disadvantages of the present methods, a new technique using dark region ratio of the reflected laser to determine the dynamic surface roughness is proposed. The measuring range of surface roughness is from 0.05μm to 1.6μm or from 0.4μm to 12.5μm which is related to the reflected initial average optical intensity. The influence factors such as speed, initial optical intensity on the dark region ratio have been discussed. The measuring results are very close to that measured by Telyer soft.