Difference of Irradiation Effects between Ar Cluster Ion and Ar+ for DLC film formation

In order to study the influences of Ar monomer ion (Ar+) on carbon film properties induced by ion beams assisted deposition, Ar cluster ion, Ar+, and their mixed ions (Ar cluster ion and Ar+) irradiated surface during evaporation and deposition of C60. From Near Edge X‐ray Absorption Fine Structure (NEXAFS) and Raman spectroscopy measurements, lower sp2 content in carbon films was obtained via Ar cluster ion beam bombardment in comparison with bombardment by Ar+ and mixed ion beams. Furthermore higher hardness and smoothness of surface were demonstrated via Ar cluster ion bombardments. Thus, it was important to irradiate using higher fraction Ar cluster ions in the beam, in order to obtain hard DLC films with flat surface.