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Fabrication and Test of an Induction Motor for the Turbomolecular Pump Using a Ceramic-Insulated Wire
Fabrication and Test of an Induction Motor for the Turbomolecular Pump Using a Ceramic-Insulated Wire
1995
Seiji Hiroki
Tetsuya Abe
Masashi Iguchi
Kouichi Yamada
Masaru Takayama
Yoshio Murakami
Keywords:
Induction motor
Ceramic
Electronic engineering
Analytical chemistry
Turbomolecular pump
Chemistry
Fabrication
Atomic physics
Mechanical engineering
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