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Comparative Study of Fluorinated Amorphous Carbon Films Deposited by C7F8, C7F14 and C7F16 plasmas
Comparative Study of Fluorinated Amorphous Carbon Films Deposited by C7F8, C7F14 and C7F16 plasmas
2005
T.-C. Wei
C. H. Liu
C. I. Yu
Keywords:
Plasma
Amorphous carbon
Carbon film
Inorganic chemistry
Materials science
Chemical engineering
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