Amorphization and Annealing of 6H SiC Implanted with N-Type, P-Type or Isovalent Dopants

lons of boron, phosphorous, titanium and neon were implanted into (0001) oriented 6H SiC crystals at 300 K. Implantation energies and fluences were chosen to produce equal (calculated) displacements per atom at similar peak damage depths and a randomized (metaminct or amorphous) zone extending to the front surface. RBS/channeling was used to test the amorphization criteria. Dopant effects on regrowth kinetics and microhardness have been determined by isochronal annealing.